Plasma Processing. Thin Film Formation and Surface Modification by Low Temperature Plasmas.
نویسندگان
چکیده
منابع مشابه
Low-temperature thin-film deposition and crystallization.
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ژورنال
عنوان ژورنال: Kakuyūgō kenkyū
سال: 1992
ISSN: 0451-2375,1884-9571
DOI: 10.1585/jspf1958.68.577